Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| PE010695 | CMP | Speedfam | SWITCH,ROLLER LEVER | New OEM | Contact Us |
| PE370018 | CMP | Speedfam | SWITCH,LIMIT WITH ACTUATOR | New OEM | Contact Us |
| PK410010 | CMP | Speedfam | SWITCH,RKER RED/GREEN FLTR | New OEM | Contact Us |
| PU010041 | CMP | Speedfam | CABLE,FIBER 1 M L DIFFUSE 6MM | New OEM | Contact Us |
| PU010131 | CMP | Speedfam | SWITCH,SNSR PROXIMITY SWITCH | New OEM | Contact Us |
| PU160035 | CMP | Speedfam | SNSR,FIBER OPTIC FU37 | New OEM | Contact Us |
| PU160040 | CMP | Speedfam | SNSR,PHOTOELECTRIC | New OEM | Contact Us |
| PU160042 | CMP | Speedfam | SNSR,KEYENCE | New OEM | Contact Us |
| PU160046 | CMP | Speedfam | PHOTOELECTRIC AMP | New OEM | Contact Us |
| PU160081 | CMP | Speedfam | SWITCH,SNSR FIBER OPTIC | New OEM | Contact Us |
| PU320258 | CMP | Speedfam | SWITCH,SNSR TACHOMETER | New OEM | Contact Us |
| PU670045 | CMP | Speedfam | SWITCH,SOLID STATE SWITCHES | New OEM | Contact Us |
| PV670045 | CMP | Speedfam | SWITCH | New OEM | Contact Us |
| QH190014 | CMP | Speedfam | CB, 2AMP 1POLE | New OEM | Contact Us |
| QH190024 | CMP | Speedfam | CB,10AMP 1POLE | New OEM | Contact Us |
| QP170022 | CMP | Speedfam | RELAY,SOLID STATE 110V | New OEM | Contact Us |
| QR280024 | CMP | Speedfam | VARIABLE RESISTR 4 VERSA TIMER | New OEM | Contact Us |
| QR280032 | CMP | Speedfam | TIMER SINGLE SHOT 1-100SEC | New OEM | Contact Us |
| QT060019 | CMP | Speedfam | FIBER OPTIC-NPN FS2-60LEAD ELE | New OEM | Contact Us |
| QT370190 | CMP | Speedfam | PWR SUPPLY,+5V/20A+12V/1A-12V/1A- | New OEM | Contact Us |
| QU140073 | CMP | Speedfam | CNTRLR,MTR 115VAC IN 130VDC OUT | New OEM | Contact Us |
| QV100011 | CMP | Speedfam | MTR,ARM POSITION | New OEM | Contact Us |
| QV130015 | CMP | Speedfam | MTR,3/4 HP PM MTR 90 VDC | New OEM | Contact Us |
| QV520010 | CMP | Speedfam | MTR, STEPPER 5VDC 1A 4PH SZ23 | New OEM | Contact Us |
| QV560007 | CMP | Speedfam | SMTR, 34WDRFF KEY, 1.50 SHAFT | New OEM | Contact Us |
| QV700015 | CMP | Speedfam | SLIDE MTR | New OEM | Contact Us |
| QV750045 | CMP | Speedfam | MTR,STEPPER DRIVE | New OEM | Contact Us |
| RA030037 | CMP | Speedfam | FAN, 240 CFM | New OEM | Contact Us |
| RA080013 | CMP | Speedfam | FAN, 24VDC BOX | New OEM | Contact Us |
| RE230001 | CMP | Speedfam | HEATER,IMMERSION 3KW 240V 1PH | New OEM | Contact Us |
| RE260002 | CMP | Speedfam | HEATER, ELEMENT 1NPS 7.5IMRSD 380V 3 | New OEM | Contact Us |
| RK210009 | CMP | Speedfam | LOAD CELL | New OEM | Contact Us |
| RK210020 | CMP | Speedfam | LOAD CELL, MINI LOW PRO 1000LBS | New OEM | Contact Us |
| RT030102 | CMP | Speedfam | PIN,20-24GA LOOSE PIECE | New OEM | Contact Us |
| RT030129 | CMP | Speedfam | CONNECTOR,PLUG 11-4 (AMP) | New OEM | Contact Us |
| RT030134 | CMP | Speedfam | CLAMP,CABLE KIT SIZE 11 .375 SCREWS | New OEM | Contact Us |
| RT570010 | CMP | Speedfam | FERRULE,20-22AWG ORANGE | New OEM | Contact Us |
| RT570014 | CMP | Speedfam | FERRULE,14AWG BLUE | New OEM | Contact Us |
| RW100018 | CMP | Speedfam | GROMMET,.125 PNL THICK NATRL NYLON | New OEM | Contact Us |
| TN100013 | CMP | Speedfam | MODULE, QUAD INPUT | New OEM | Contact Us |
| TP100014 | CMP | Speedfam | MODULE,QUAD OUTPUT | New OEM | Contact Us |
| TR030005 | CMP | Speedfam | ENDS,ISOLATION FRONT SIGNAL COND | New OEM | Contact Us |
| TR440015 | CMP | Speedfam | Sensor Hardware & Accessories +/-10 VDC Output I2318 to 32VDC Input | New OEM | Contact Us |
| VE030040 | CMP | Speedfam | POTENTIOMETER,1 TURN 10K OHM | New OEM | Contact Us |
| VF150225 | CMP | Speedfam | ENCODER,OPTICAL | New OEM | Contact Us |
| VH140001 | CMP | Speedfam | DIODE | New OEM | Contact Us |
| 143122 | CMP | Speedfam | O-RING,15.60X1.78MM,NBR 70,PM200/PM300 | New OEM | Contact Us |
| 202989 | CMP | Speedfam | BELLOWS, 10/ 25MM,12-35MM,NEOPRENE,PM200 | New OEM | Contact Us |
| 208703 | CMP | Speedfam | CONN,CABLE,MALE,4 CONTACTS,4A,PM200/PM30 | New OEM | Contact Us |
| 211622 | CMP | Speedfam | VALVE,PRESS REGLTR,G1/8,0-10V,PM200 | New OEM | Contact Us |
| 212623 | CMP | Speedfam | O-RING,26X2MM,NBR 70,PM200/PM300 | New OEM | Contact Us |
| 221704 | CMP | Speedfam | BUSHING,LINEAR,BALL,16X25X8MM,STEEL,PM20 | New OEM | Contact Us |
| 230170 | CMP | Speedfam | PIN,DIA 9MM,PM200 | New OEM | Contact Us |
| 232521 | CMP | Speedfam | NOZZLE,METAL,.46MM,PM200/PM300 | New OEM | Contact Us |
| 235557 | CMP | Speedfam | NOZZLE,HLDR,14X19X55MM,PVDF,PM200 | New OEM | Contact Us |
| 238265 | CMP | Speedfam | SHIM,UNDER FOIL,D500,25 M,PM200 | New OEM | Contact Us |
| 246438 | CMP | Speedfam | BEARING,BALL,GROOVE,50X72X12MM,SST,PM200 | New OEM | Contact Us |
| 950181 | CMP | Speedfam | RETAIN,BEARING,PAD,CONDITIONER | New OEM | Contact Us |
| 950182 | CMP | Speedfam | SHAFT,DISK,PAD,CONDITIONER | New OEM | Contact Us |
| 951114 | CMP | Speedfam | TERMINAL,SOCKET,TYPEIICRIMP24-20AW | New OEM | Contact Us |
| 951464 | CMP | Speedfam | CONNECTOR SHELL,MALE | New OEM | Contact Us |
| 951465 | CMP | Speedfam | CONNECTOR SHELL, FEMALE | New OEM | Contact Us |
| 951466 | CMP | Speedfam | CONNECTOR,CONTACT,POGO | New OEM | Contact Us |
| 951468 | CMP | Speedfam | CONNECTOR,CONTACT,PIN | New OEM | Contact Us |
| 951801 | CMP | Speedfam | SOCKET,RELAY SPDT DIN-RAIL 5 BLADE | New OEM | Contact Us |
| 951802 | CMP | Speedfam | RELAY,SPDT 24VDC COIL | New OEM | Contact Us |
| 953999 | CMP | Speedfam | BRUSH,CARRIER EDGE | New OEM | Contact Us |
| 954074 | CMP | Speedfam | MODULAR SENSING CABLE | New OEM | Contact Us |
| 954265 | CMP | Speedfam | SHAFT,CVT,VT,ELEVATOR | New OEM | Contact Us |
| 956212 | CMP | Speedfam | FOLLOWER,CAM | New OEM | Contact Us |
| 956476 | CMP | Speedfam | ARM,GRIPPER,RIGHT,200MM | New OEM | Contact Us |
| 956925 | CMP | Speedfam | FINGER,GRIPPER,200MM | New OEM | Contact Us |
| 956926 | CMP | Speedfam | FINGER,GRIPPER,200MM | New OEM | Contact Us |
| 960276 | CMP | Speedfam | ROLLER,ONE PART | New OEM | Contact Us |
| 960405 | CMP | Speedfam | SPRING,COMPRESSION,LOAD CUP | New OEM | Contact Us |
| 961015 | CMP | Speedfam | KIT,MOTOMAN,T-AXIS CABLE | New OEM | Contact Us |
| 964253 | CMP | Speedfam | MANIFOLD,4 VALVES 1/4FNPT PORTS | New OEM | Contact Us |
| 966146 | CMP | Speedfam | MOTOR,SERVO,W/PULLEY | New OEM | Contact Us |
| 966651 | CMP | Speedfam | CABLE,SENSOR,SINGLE,OPEN | New OEM | Contact Us |
| 966652 | CMP | Speedfam | CABLE,SENSOR,DOUBLE,COMB. | New OEM | Contact Us |
| 966715 | CMP | Speedfam | SENSOR,ASSY,WAFER MISSING | New OEM | Contact Us |
| 968882 | CMP | Speedfam | ASSY,PAD BACKER RIVITED 15 HOLES 6/776 | New OEM | Contact Us |
| 969975 | CMP | Speedfam | COUPLING,STAINLESS | New OEM | Contact Us |
| 969991 | CMP | Speedfam | O-RING,G85 | New OEM | Contact Us |
| 972483 | CMP | Speedfam | BAND,ROLLER 86 DUROMETER | New OEM | Contact Us |
| 973425 | CMP | Speedfam | CYLINDER,63MM BORE SINGLE ROD DBL ACTING | New OEM | Contact Us |
| 975461 | CMP | Speedfam | SWITCH,30V 145PSI NPN OUT PRESS DIGITAL | New OEM | Contact Us |
| 978591 | CMP | Speedfam | FTG,CAP,1/4FNPT,316SST | New OEM | Contact Us |
| 0100-700361 | CMP | Speedfam | MODULE,OUT PLC | New OEM | Contact Us |
| 0150-111674 | CMP | Speedfam | DRIVER,STEPPER 5PH 24VDC W/O GEARHEAD | New OEM | Contact Us |
| 0150-717406 | CMP | Speedfam | PWR SUPPLY,QWS 2412 | New OEM | Contact Us |
| 0150-738515 | CMP | Speedfam | GENERATOR,VACUUM W/NPT THREADS | New OEM | Contact Us |
| 02-182182-00 | CMP | Speedfam | ASSY,PADBACKER RIVET 16 HOLE CENTER PLUG | New OEM | Contact Us |
| 0225-771163 | CMP | Speedfam | LIGHT TOWER,AC/DC 24V 11W | New OEM | Contact Us |
| 02-386926-00 | CMP | Speedfam | ASSY,PAD BACKING RIVETED,25 HOLES,776 PO | New OEM | Contact Us |
| 0325-109981 | CMP | Speedfam | CABLE,14AWG 5COND 600V OLFLEX 190 | New OEM | Contact Us |
| 03-378214-00 | CMP | Speedfam | CBL ASSY,FLOW SWITCH,776 POLISHER | New OEM | Contact Us |
| 04-356546-00 | CMP | Speedfam | KIT,ONSERT,CUSTOMER REFURB,KEVLAR BLADDE | New OEM | Contact Us |
| 04-356619-00 | CMP | Speedfam | KIT,ONSERT,CUSTOMER REFURB,XCEDA STD CAR | New OEM | Contact Us |
| 04-357920-00 | CMP | Speedfam | KIT,ONSERT,CUSTOMER REFURB,T7 BLADDER | New OEM | Contact Us |