Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| AC2120A1 | CMP | Speedfam | WSHR,LOCK,SHAFT,M35 | New OEM | Contact Us |
| AC2134A1 | CMP | Speedfam | SEAL,LIP,1.25IDX.438W | New OEM | Contact Us |
| AC2135A1 | CMP | Speedfam | SEAL,LIP,2.0IDX3.75W | New OEM | Contact Us |
| AC2199A1 | CMP | Speedfam | RING,WIPER,PUR,2.5 ID | New OEM | Contact Us |
| AC2202A1 | CMP | Speedfam | XDCR,I/P,0-60PSI | New OEM | Contact Us |
| AC2204A1 | CMP | Speedfam | SEAL,SPRING LOADED,TEFLON | New OEM | Contact Us |
| AC2226A1 | CMP | Speedfam | FTG,COMPRESSION,PVC,SXMT | New OEM | Contact Us |
| AC2425A1 | CMP | Speedfam | XDCR,I/P,0-30PSI | New OEM | Contact Us |
| AC2437A1 | CMP | Speedfam | CYLINDER,AIR,2.0 BORE X 4.0S | New OEM | Contact Us |
| AC2440A1 | CMP | Speedfam | SEAL,SPRING LOADED,TEFLN,7.01D | New OEM | Contact Us |
| AC2483A1 | CMP | Speedfam | SPRING,COMP,SST,.30ODX.625L | New OEM | Contact Us |
| AC2621A1 | CMP | Speedfam | WSHR,SEALING,SST,.18ID | New OEM | Contact Us |
| AC2664A1 | CMP | Speedfam | WSHR,SEALING,SST,.275ID | New OEM | Contact Us |
| AC2699A1 | CMP | Speedfam | CLAMP,HOSE,ACETAL,7/8"NOM. | New OEM | Contact Us |
| AC2712A1 | CMP | Speedfam | SEAL,TEFLON,SPRING LOADED | New OEM | Contact Us |
| AC2727A1 | CMP | Speedfam | SNSR,PROXIMITY | New OEM | Contact Us |
| AC2729A1 | CMP | Speedfam | SHIM,1/2ID,3/4OD,.001THK | New OEM | Contact Us |
| AC2730A1 | CMP | Speedfam | SHIM,1/2ID,3/4OD,.003THK | New OEM | Contact Us |
| AC2731A1 | CMP | Speedfam | SHIM,1/2ID,3/4OD,.010THK | New OEM | Contact Us |
| AC2733A1 | CMP | Speedfam | BEARING,BALL,FLNGD,.5 X 1.125 | New OEM | Contact Us |
| AC2734A1 | CMP | Speedfam | RING,RETAINING,EXTERNAL,SPR ST | New OEM | Contact Us |
| AC2759A1 | CMP | Speedfam | SEAL,SPRING LOADED,TFE | New OEM | Contact Us |
| AC2764A1 | CMP | Speedfam | SWITCH,VACUUM | New OEM | Contact Us |
| AC2767A1 | CMP | Speedfam | SNSR,PHOTO,24VDC | New OEM | Contact Us |
| AC2784A1 | CMP | Speedfam | SEAL,TEFLON,SPRING-LOADED | New OEM | Contact Us |
| AC2852A1 | CMP | Speedfam | REGULATOR,PRECISION,0-60PSI | New OEM | Contact Us |
| AC2866A1 | CMP | Speedfam | NOZZLE,FAN,90DEG,TFE,1/8MN | New OEM | Contact Us |
| AC2886A1 | CMP | Speedfam | CLAMP,HOSE,ACETAL,3/8NOM | New OEM | Contact Us |
| AC3002A1 | CMP | Speedfam | MTR,PUMP,240VAC,0-600RPM | New OEM | Contact Us |
| AC3014A1 | CMP | Speedfam | SNSR,PROXIMITY,5.4 DIA,24VDC | New OEM | Contact Us |
| AC3049A1 | CMP | Speedfam | O-RING,BUNA, 2-228 | New OEM | Contact Us |
| AC3099A1 | CMP | Speedfam | GAUGE,0-15PSI,1/4NPT | New OEM | Contact Us |
| AC310127 | CMP | Speedfam | SCRW, FHC 10-32 X 3/8 SST | New OEM | Contact Us |
| AC3115A1 | CMP | Speedfam | VALVE,CHECK,PTFE,1/4FNPT | New OEM | Contact Us |
| AC3118A1 | CMP | Speedfam | VALVE,AIR OPERATED,PVC,1/2 | New OEM | Contact Us |
| AC3303A1 | CMP | Speedfam | CYLINDER,AIR | New OEM | Contact Us |
| AC3324A1 | CMP | Speedfam | RELAY,24VAC,DPDT | New OEM | Contact Us |
| AC3356A1 | CMP | Speedfam | SWITCH,PRESSURE,1/8"NPT AIR | New OEM | Contact Us |
| AC3414A1 | CMP | Speedfam | TUBING,PFA,1/2 OD | New OEM | Contact Us |
| AC3460A1 | CMP | Speedfam | SPRAY GUN,RECIRCULATING,TEFLON | New OEM | Contact Us |
| AC3466A1 | CMP | Speedfam | TUBING,CORRUGATED,1/2 | New OEM | Contact Us |
| AC3565A1 | CMP | Speedfam | SEAL,TEFLON | New OEM | Contact Us |
| AC3579A1 | CMP | Speedfam | VALVE,3 WAY,AIR,1/2 NPT | New OEM | Contact Us |
| AC3624A1 | CMP | Speedfam | SNSR,AIR CYLINDER | New OEM | Contact Us |
| AC3648 | CMP | Speedfam | AIR CYLINDER | New OEM | Contact Us |
| AC3767 | CMP | Speedfam | SEAL,TEFLON,SPRING-LOADED | New OEM | Contact Us |
| AD1011A1 | CMP | Speedfam | CABLE,LOAD CELL | New OEM | Contact Us |
| AD1012A1-6 | CMP | Speedfam | CABLE,LOAD CELL AMP | New OEM | Contact Us |
| AD2132A1 | CMP | Speedfam | ADPTR,SEAL - IDLER PULLEY | New OEM | Contact Us |
| AD2148D1 | CMP | Speedfam | PLATE,PISTON - UNLOAD CUP | New OEM | Contact Us |
| AD2158C1 | CMP | Speedfam | PLATE,PISTON - LOAD CUP | New OEM | Contact Us |
| AD2319C1 | CMP | Speedfam | PADDLE,200MM WAFER,UNLOAD | New OEM | Contact Us |
| AD2592A1 | CMP | Speedfam | SLEEVE,LOCK-CARRIER QUICK REL | New OEM | Contact Us |
| AD2599B1 | CMP | Speedfam | HINGE,LINER COVER-MAIN LINER | New OEM | Contact Us |
| AD2604A1 | CMP | Speedfam | SUPPORT,CENTER-MAIN LINER ASSY | New OEM | Contact Us |
| AD2608A1 | CMP | Speedfam | SUPPORT,PARK POS-MAIN LIN ASSY | New OEM | Contact Us |
| AD2696B1 | CMP | Speedfam | RING,GUIDE,200MM,LOW PROFILE | New OEM | Contact Us |
| AD2705A1 | CMP | Speedfam | SHIM,0.051MMTHK,200MM,WFR CAR | New OEM | Contact Us |
| AD2706A1 | CMP | Speedfam | SHIM,0.075MMTHK,200MM,WFR CAR | New OEM | Contact Us |
| AD2707A1 | CMP | Speedfam | SHIM,0.254MMTHK,200MM,WFR CAR | New OEM | Contact Us |
| AD2812A1 | CMP | Speedfam | ROD,UNLOAD CUP-INDEX TABLE | New OEM | Contact Us |
| AD3006B1 | CMP | Speedfam | PIN,DRIVE-GYRO GIMBAL CARRIER | New OEM | Contact Us |
| AD3013B1 | CMP | Speedfam | PLATE,PRESSURE,200MM-29 H,FLAT | New OEM | Contact Us |
| AD3202 | CMP | Speedfam | PLATE,CYLINDER MOUNT-INDEX TBL | New OEM | Contact Us |
| AD3357 | CMP | Speedfam | HOUSING,SPRING SEAL | New OEM | Contact Us |
| AJ215071 | CMP | Speedfam | SCRW, SHLDR 1/4-20 X 3/8 X 1/2 SST | New OEM | Contact Us |
| AM241115 | CMP | Speedfam | SCRW,TH 6-32 X 1/4 SST | New OEM | Contact Us |
| AT210181 | CMP | Speedfam | SCRW,SET FULL DOG 10-32 X 1/2 SST | New OEM | Contact Us |
| BA020010 | CMP | Speedfam | NUT,HEX 1/4-28 SST | New OEM | Contact Us |
| BA220011 | CMP | Speedfam | NUT,JAM 5/16-24 SST | New OEM | Contact Us |
| BA220012 | CMP | Speedfam | NUT,JAM 3/8-24 SST | New OEM | Contact Us |
| BB710056 | CMP | Speedfam | NUT, LOCK SHAFT | New OEM | Contact Us |
| BB710061 | CMP | Speedfam | NUT,LOCK SHAFT NO.11 STL PLD | New OEM | Contact Us |
| BE120006 | CMP | Speedfam | WSHR, FLAT SAE NO.6 SST | New OEM | Contact Us |
| BE120008 | CMP | Speedfam | WSHR,FLAT,SAE NO.10 SST | New OEM | Contact Us |
| BE520008 | CMP | Speedfam | WSHR,LOCK,SPLIT,RING #10 SST | New OEM | Contact Us |
| BF410056 | CMP | Speedfam | WASHER, LOCK SHAFT | New OEM | Contact Us |
| BF520008 | CMP | Speedfam | WSHR,LOCK,SPLIT,#10 SST | New OEM | Contact Us |
| BH120091 | CMP | Speedfam | PIN, DOWEL 3/16 X 3/4 SST | New OEM | Contact Us |
| BH120144 | CMP | Speedfam | PIN,DOWEL 1/4 X 1" SST | New OEM | Contact Us |
| CB101113 | CMP | Speedfam | RING,RETAINING EXT 1.125 SHAFT SST | New OEM | Contact Us |
| CE020261 | CMP | Speedfam | CUP,RLR BRG 4.3307 OD | New OEM | Contact Us |
| CESCMP00037A | CMP | Speedfam | TEFLON R3 WAND | New OEM | Contact Us |
| CESCMP00039A | CMP | Speedfam | ASSY,SLURRY FLOW MONITOR 676/776 | New OEM | Contact Us |
| CESCMP10621A | CMP | Speedfam | KIT,QUICK CONNECT,CARRIER,MV200 | New OEM | Contact Us |
| CF020198 | CMP | Speedfam | CONE,RLR BRG 2.000 BORE | New OEM | Contact Us |
| CF020252 | CMP | Speedfam | CONE,RLR BRG 2.2500 BORE | New OEM | Contact Us |
| CH030673 | CMP | Speedfam | BEARING,NEEDLE 2-1/8 OD 1.50 LG | New OEM | Contact Us |
| CH031086 | CMP | Speedfam | BEARING,NDL 1-1/4 B 1-1/2 OD 1"W | New OEM | Contact Us |
| CJ030114 | CMP | Speedfam | BEARING,THR 1.250B X 1.937 OD.060TK | New OEM | Contact Us |
| CJ030115 | CMP | Speedfam | BEARING,THR 1.250 B X 1.937 OD | New OEM | Contact Us |
| CN120175 | CMP | Speedfam | BEARING,BALL.375 B .875 OD .969 FLG | New OEM | Contact Us |
| CPS-03-00008 | CMP | Speedfam | CABLE ASSY,MAIN (UI) TO MAIN (QNX) PC,RS232 | New OEM | Contact Us |
| CPS04-000304-00 | CMP | Speedfam | KIT,TUBING,AURIGA, 952865 REPLACEMENT | New OEM | Contact Us |
| CPS04-000307-00 | CMP | Speedfam | COMPUTER, LAPTOP, WIN XP, BROOKSIDE VIEWER, SENTINEL | New OEM | Contact Us |
| CPS04-000310-00 | CMP | Speedfam | KIT,VFD,YASKAWA J1000 DRIVE | New OEM | Contact Us |
| CPS04-000311-00 | CMP | Speedfam | KIT, DRIVE, SERVO 200VAC, REPLACED 0150-739383 | New OEM | Contact Us |
| CPS04-000312-00 | CMP | Speedfam | KIT, 3HP, S15 DRIVE UPGD, 676 | New OEM | Contact Us |
| CPS-04-10055 | CMP | Speedfam | KIT, NO BUFF, MV200 | New OEM | Contact Us |
| CPS-04-10075 | CMP | Speedfam | KIT,REGULATOR,PRESSURE ULTRA PURE, REPLACEMENT | New OEM | Contact Us |