Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 728-099501-001 | LAM | SCR SHLDR SST M10X16mm LAM 9100 | As Is | Contact Us | |
| 908078-017 | SVG | HEATER UPPER ELBOW FOR SVG FURNACE | As Is | Contact Us | |
| 15-00311-00 | NOVELLUS | CAP HEATER FEEDTHRU NOVELLUS CVD | As Is | Contact Us | |
| 31-00114-00 | NOVELLUS | RELAY SSR 90A HEATERBLOCK NOVELLUS CVD | As Is | Contact Us | |
| 34-10095-00 | NOVELLUS | RELAY SSR 240V 25A NOVELLUS CVD | As Is | Contact Us | |
| 802-4506-43 | BROOKS AUTOMATON | SCREW SBHS M2.5*.45*6mm lg SST EP LAM 94 | As Is | Contact Us | |
| 803-5005-03 | BROOKS AUTOMATON | SCREW SHCS M3*.50*5mm lg EP-CRK LAM 9400 | As Is | Contact Us | |
| 803-5016-03 | BROOKS AUTOMATON | SCREW SHCS M3*.50*16mm lg SST EP LAM 940 | As Is | Contact Us | |
| 808-1218-00 | BROOKS AUTOMATON | SCREW SHCS M8*1.25*18mm lg SST LAM 9400 | As Is | Contact Us | |
| 4001-7958-01 | ASYST | ROD,GRIPPER RIGHT,ASYST PN:4001-7958-01, | As Is | Contact Us | |
| 4001-7958-02 | ASYST | ROD,GRIPPER LEFT,ASYST PN:4001-7958-02, | As Is | Contact Us | |
| 9600-0696-01 | ASYST | LEAD-SCREW,GRIPPER DRIVER,ASYST PN:9600- | As Is | Contact Us | |
| 7500-0394-04 | ASYST | PIN,SS,.099*.38EA,ASYST PN:7500-0394-04 | As Is | Contact Us | |
| 4001-8109-01 | ASYST | MOUNT,GRIPPER,ASYST PN:4001-8109-01, FOR | As Is | Contact Us | |
| 4001-8025-01 | ASYST | SHAFT,GRIPPER,ASYST PN:4001-8025-01, FOR | As Is | Contact Us | |
| 7500-0370-01 | ASYST | BALL BEARING,ASYST PN:7500-0370-01, FOR | As Is | Contact Us | |
| 9600-0622-01 | ASYST | PULLEY,GRIPPER,ASYST PN:9600-0622-01,FOR | As Is | Contact Us | |
| PL1288 | SCH ELECTRONIC | WAFER GUIDE 200MM,DFA WAF,HISSAN PN:2J38 | As Is | Contact Us | |
| 15-10379-00 | ZZ-OEM | HIGH PURITY SLIT-VALVE | As Is | Contact Us | |
| 9700-3265-01 | ASYST | INDEXER SEATERHOME SENSOR | As Is | Contact Us | |
| 15-00341-00 | NOVELLUS | SCREW, STRAP, NICKEL | As Is | Contact Us | |
| VT-P8258602 | VAT | MECHANISM,(IN AMAT VALVE,P/N 3870-03069) | As Is | Contact Us | |
| 001-7550-03 | BROOKS AUTOMATON | SCREW,FIX SPRING IN PLATFORM | As Is | Contact Us | |
| 803-5012-09 | BROOKS AUTOMATON | SCREW,FIX INNER SPRING IN PLATFORM | As Is | Contact Us | |
| 849-0011-07 | BROOKS AUTOMATON | SCREW, FIX SHOULDER AXIS IN PLATFORM | As Is | Contact Us | |
| 0090-20303 | AMAT | SW ASSY WTR FLOW 1/4 NPT BRS 0.5 GPM | As Is | Contact Us | |
| 15-149996-00 | NOVELLUS | PLATE, GATE, L-TYPE GB, 46X 236, | As Is | Contact Us | |
| 15-107698-00 | NOVELLUS | CAP, CERAMIC , FEEDTHRU , NOVELLUS CVD | As Is | Contact Us | |
| 20-00209-00 | NOVELLUS | SCRW,SKT,HEX,CRS,BLK FOR NOVELLUS CVD | As Is | Contact Us | |
| 3MFV110AQ002 | HORIBA STEC | MFC,FOR HTF SIH2CL2 400 SCCM,TPC | As Is | Contact Us | |
| 9700-4091-01 | ASYST | I/O ASSY,MINI, GRIPPER CONTROL PCB FOR | As Is | Contact Us | |
| FC-7800CD-4V-C3F8-500SCCM | AERA JAPAN | MFC,AE,C3F8 500 SCCM, 4V | As Is | Contact Us | |
| 9700-2140-01 | ASYST | CONTROL SWITCH PANEL ASSY ASYST PN:9700- | As Is | Contact Us | |
| HBO-201W/HS-D2 | TEL Developer | TEL | UV Lamp | New | Contact Us |